Electron Microscopes/TEM/REM

Title of series 
Foundations of Metrology – Instrumentation
Event Type 

The lecture will cover a description of the basic components of electron microscopes as well as the electron interactions in the sample material which are of importance for the imaging process.

In addition the influence of sample topography on the imaging contrast will be discussed in combination with examples for the application of scanning electron microscopy for dimensional metrology on nanoscale features.

The talk will cover different types of electron microscopes, namely transmission electron microscope (TEM), scanning electron microscope (SEM), combined focussed ion beam (FIB)/SEM instrumentation and Helium ion microscopy (HIM), however with a clear focus on SEM imaging, SEM contrast simulations and SEM applications in dimensional metrology.

2018/06/21 - 17:15 - 18:45
Institut für Elektrische Messtechnik und Grundlagen der Elektrotechnik
Hans-Sommer-Str. 66
38106 Braunschweig
5th floor, room 518