Surface Metrology and Analysis

Title of series 
Foundations of Metrology: Methods of Metrology
Event Type 

In modern fields of research high-resolution microscopes are used to investigate the topography and other physical properties of surfaces on the micro- and nanometer scale. Microscopes of different kinds, i.e. optical, electron or scanning probe are used to measure dimensional properties of micro- and nanostructures. It is important to ensure that the used optical techniques (phase shift, white light or con-focal) and scanning probe microscopes (SPM) are calibrated traceable to the SI unit of length. To achieve this, standards are needed to calibrate the properties of the used instrument as well as to verify its use for more complex measurement tasks, like micro-form and nano-roughness.

SPM are also used to measure other physical properties of sample surfaces or interfaces, like mechanical, electrical, etc. The Scanning Tunnelling Microscope (STM) developed by Binnig and Rohrer in 1981 allows to visualize the electronic structure of surfaces. The Atomic Force Microscope (AFM) or SPM which uses a small cantilever with a fine tip capable of detecting small forces acting on the tip at surfaces is used to measure mechanical and electrical properties of the surface.

2017/06/29 - 17:15 - 18:45
Institut für Elektrische Messtechnik und Grundlagen der Elektrotechnik
Hans Sommer Str. 66
38106 Braunschweig
5th floor, room 518